Micro-electro-optical-mechanical System; MEMS Mechanics; Micro Scraping Machining; Non-silicon-based Micromachining Optical Devices
Meng-Ju Lin received the B.S. and Ph.D. degrees in power mechanical engineering from National Tsing Hua University, Hsinchu, Taiwan, in 1990 and 2002 and the M.S. degree in applied mechanics from National Taiwan University, Taipei, Taiwan in 1992. He is currently the associate professor in Department of Mechanical and Computer Aided Engineering, Feng Chia University, Taiwan. His research interests include sticking effect, squeeze film, thermal stress and fatigue problems in MEMS, micro scraping machining, non-silicon-based micromachining optical devices, and the micro torsion and focusing deformable mirror.